2004•Thin Solid FilmsRequires access

Comparison of microstructure and mechanical properties of chromium nitride-based coatings deposited by high power impulse magnetron sputtering and by the combined steered cathodic arc/unbalanced magnetron technique

Arutiun Papken Ehiasarian, P.Eh. Hovsepian, Lars Hultman, Ulf Helmersson

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Key concepts: High-power impulse magnetron sputtering, Materials science, Chromium nitride, Sputter deposition, Microstructure, Metallurgy, Coating, Physical vapor deposition

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Comparison of microstructure and mechanical properties of chromium nitride-based coatings deposited by high power impulse magnetron sputtering and by the combined steered cathodic arc/unbalanced magnetron technique — Research Paper | ScholarLens