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2007•한국진공학회 학술발표회초록집Requires access

Reduction of Defects at the SiO₂/SiC Interface by MeV Electron Beam Irradiation

Cheolho Jeon, Ji-Hyun Nam, Wei Hua Song, Min-Seung Jung, Hye‐Min Shin, Yu Han, B. C. Lee, Chang-Jun Park, Joung Real Ahn

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Key concepts: Irradiation, Reduction (mathematics), Materials science, Cathode ray, Beam (structure), Interface (matter), Radiochemistry, Electron

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Reduction of Defects at the SiO₂/SiC Interface by MeV Electron Beam Irradiation — Research Paper | ScholarLens