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2004•한국진공학회 학술발표회초록집Requires access

Improvement of secondary electron emission coefficient(γ) of the MgO film by O₂Plasma - Treatment

Jiyoon Jeong, H. S. Jeong, W. B. Park, Jaechul Lim, J. W. Cho, Eun Ha Choi

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Key concepts: Plasma, Secondary emission, Materials science, Electron, Physics, Nuclear physics

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Improvement of secondary electron emission coefficient(γ) of the MgO film by O₂Plasma - Treatment — Research Paper | ScholarLens