2003•한국진공학회 학술발표회초록집Requires access

IMeasurement of ion - induced secondary electron emission coefficient for MgO thin film with O₂plasma treatme

Jiyoon Jeong, H. S. Jeong, Jaechul Lim, W. B. Park, J. W. Cho, Eun Ha Choi

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Key concepts: Ion, Plasma, Materials science, Secondary emission, Electron, Atomic physics, Chemistry, Physics

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IMeasurement of ion - induced secondary electron emission coefficient for MgO thin film with O₂plasma treatme — Research Paper | ScholarLens