2008•TNO RepositoryOpen access
Pilot roll-to-roll PECVD system for fabrication of thin film Si solar cells
Maurits C. R. Heijna, B.B. va. Aken
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Maurits C. R. Heijna, B.B. va. Aken
Abstract
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Key concepts: Plasma-enhanced chemical vapor deposition, Materials science, Roll-to-roll processing, Deposition (geology), Amorphous silicon, Fabrication, Optoelectronics, Thin film