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2001•MRS ProceedingsRequires access

Si/GaAs heterostructures fabricated by direct wafer bonding

Viorel Drăgoi, Marin Alexe, Manfred Reiche, Ionut Radu, Erich Thallner, C. Schaefer, Paul F. Lindner

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Key concepts: Materials science, Wafer, Heterojunction, Wafer bonding, Annealing (glass), Optoelectronics, Fabrication, Anodic bonding

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