1990•IEEE Transactions on Components Hybrids and Manufacturing TechnologyRequires access

Benzocyclobutene interlayer dielectrics for thin film multichip modules

Wayne Johnson, T.L. Phillips, W. Ken Weidner, Stephen F. Hahn, D.C. Burdeaux, P. H. Townsend

Abstract

An organic dielectric derived from benzocyclobutene has been investigated as an interlayer dielectric for thin-film multichip modules. The material is processed using standard semiconductor techniques. Key attributes of the polymer are a low dielectric constant

About this research paper

What this paper is about

Why it matters

OpenAlex reports 26 citations for this work. Citation counts describe recorded attention and do not establish research quality.

Key contribution

A contribution statement is not available in the OpenAlex record.

Method / approach

Method details are not available in the OpenAlex metadata.

Main findings

Findings are not separately available in the OpenAlex metadata.

Limitations

Limitations are not available in the OpenAlex metadata.

Applications

Application details are not available in the OpenAlex metadata.

Available abstract

Key concepts: Benzocyclobutene, Dielectric, Materials science, Thin film, Polymer, Semiconductor, Optoelectronics, Composite material