Ion beam analysis of ion-assisted deposited amorphous GaN
J. Kennedy, A. Markwitz, U. D. Lanke, A. McIvor, H. J. Trodahl, A. Bittar
Abstract
J. Kennedy, A. Markwitz, U. D. Lanke, A. McIvor, H. J. Trodahl, A. Bittar
Abstract
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Key concepts: Elastic recoil detection, Ion beam analysis, Materials science, Rutherford backscattering spectrometry, Amorphous solid, Analytical Chemistry (journal), Nuclear reaction analysis, Ion beam