2006•Unpublished venueRequires access
Flow rate of micropump with spiral-type magnetic micromachine
Kazushi ISHIYAMA, Shinichi Hisatomi, Shigeto Agatsuma, A. Yamazaki, Masahiko SENDOH, Kenichi Arai
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Abstract
In this paper, a micropump with spiral-type magnetic micromachine was fabricated and the flow rate of the pump was then experimentally evaluated. The pump system proposed in this work is suitable for the micro-fluid devices because they can control the very small flow rate quantitatively and the flow rate was independent of the viscosity of the fluid.