High purity GaAs prepared from trimethylgallium and arsine
P.D. Dapkus, Harold M. Manasevit, K. L. Hess, T. S. Low, G. E. Stillman
Abstract
P.D. Dapkus, Harold M. Manasevit, K. L. Hess, T. S. Low, G. E. Stillman
Abstract
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Key concepts: Arsine, Trimethylgallium, Impurity, Metalorganic vapour phase epitaxy, Chemical vapor deposition, Photoluminescence, Analytical Chemistry (journal), Chemistry