A 1-D Theoretical Receiving Model for CMUT
Wenchao Zhou, Ting Yu, Fengqi Yu
Abstract
Wenchao Zhou, Ting Yu, Fengqi Yu
Abstract
It is always difficult to optimize parameters of capacitive micromachined ultrasonic transducers (CMUT) because of high computational cost of Finite Element Method (FEM) analysis and prototype manufacturing cost. Thus a theoretical model is required in designing a CMUT. This paper presents such a 1-D theoretical model for CMUT reception, which makes it easier to optimize the parameters of the CMUT with respect to output voltage and bandwidth. It also helps in understanding the influence of each parameter. A typical example is given for model verification. The results obtained from the proposed 1-D lumped model are compared to those from 3-D FEM simulation. Our 1-D theoretical model can be used to study the behavior of a CMUT reception at much lower computational cost without losing accuracy.
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It is always difficult to optimize parameters of capacitive micromachined ultrasonic transducers (CMUT) because of high computational cost of Finite Element Method (FEM) analysis and prototype manufacturing cost. Thus a theoretical model is required in designing a CMUT. This paper presents such a 1-D theoretical model for CMUT reception, which makes it easier to optimize the parameters of the CMUT with respect to output voltage and bandwidth. It also helps in understanding the influence of each parameter. A typical example is given for model verification. The results obtained from the proposed 1-D lumped model are compared to those from 3-D FEM simulation. Our 1-D theoretical model can be used to study the behavior of a CMUT reception at much lower computational cost without losing accuracy.
Key concepts: Capacitive micromachined ultrasonic transducers, Capacitive sensing, Finite element method, Transducer, Computer science, Ultrasonic sensor, Bandwidth (computing), Electronic engineering