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2017•Unpublished venueRequires access

Miniaturized capacitive micromachined ultrasonic transducer (CMUT) chemical sensor with low operating voltage = 저전압 소형 Capacitive Micromachined Ultrasonic Transducer(CMUT) 화학 센서

Sang jun Park

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Key concepts: Capacitive micromachined ultrasonic transducers, Capacitive sensing, Ultrasonic sensor, Transducer, Acoustics, Materials science, Voltage, Electrical engineering

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Miniaturized capacitive micromachined ultrasonic transducer (CMUT) chemical sensor with low operating voltage = 저전압 소형 Capacitive Micromachined Ultrasonic Transducer(CMUT) 화학 센서 — Research Paper | ScholarLens