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2003•Unpublished venueOpen access

SU-8 based piezoresistive mechanical sensor

Jacob Thaysen, Arda D. Yalçınkaya, R.K. Vestergaard, Søren Højgaard Jensen, Michael W. Mortensen, P. Vettiger, Ashok Menon

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Abstract

We present the first SU-8 based piezoresistive mechanical sensor. Conventionally, silicon has been used as a piezoresistive material due to its high gauge factor and thereby high sensitivity to strain changes in a sensor. By using the fact that SU-8 is much softer than silicon and that a gold resistor is easily incorporated in SU-8, we have proven that a SU-8 based cantilever sensor is almost as sensitive to stress changes as the silicon piezoresistive cantilever. We demonstrate the chip fabrication, and characterization with respect to sensitivity, noise and device failure.

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What this paper is about

We present the first SU-8 based piezoresistive mechanical sensor. Conventionally, silicon has been used as a piezoresistive material due to its high gauge factor and thereby high sensitivity to strain changes in a sensor. By using the fact that SU-8 is much softer than silicon and that a gold resistor is easily incorporated in SU-8, we have proven that a SU-8 based cantilever sensor is almost as sensitive to stress changes as the silicon piezoresistive cantilever. We demonstrate the chip fabrication, and characterization with respect to sensitivity, noise and device failure.

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Available abstract

We present the first SU-8 based piezoresistive mechanical sensor. Conventionally, silicon has been used as a piezoresistive material due to its high gauge factor and thereby high sensitivity to strain changes in a sensor. By using the fact that SU-8 is much softer than silicon and that a gold resistor is easily incorporated in SU-8, we have proven that a SU-8 based cantilever sensor is almost as sensitive to stress changes as the silicon piezoresistive cantilever. We demonstrate the chip fabrication, and characterization with respect to sensitivity, noise and device failure.

Key concepts: Piezoresistive effect, Gauge factor, Cantilever, Resistor, Materials science, Silicon, Strain gauge, Fabrication

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