2002•Japanese Journal of Applied PhysicsRequires access

Calibration of Non Linear Properties of Pb(Zr, Ti)O3Cantilever Using Integrated Piezoresistive Sensor for High Speed Atomic Force Microscopy

Hyo‐Jin Nam, Young Sik Kim, Seong-Moon Cho, Caroline Sunyong Lee, Jong‐Uk Bu, Jaewan Hong, Zheong-Gu Khim

Abstract

Calibration of Non Linear Properties of Pb(Zr, Ti)O3 Cantilever Using Integrated Piezoresistive Sensor for High Speed Atomic Force Microscopy, Nam, Hyo-Jin, Kim, Young-Sik, Cho, Seong-Moon, Lee, Caroline Sunyong, Bu, Jong-Uk, Hong, Jae-Wan, Khim, Zheong-Gu

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Key concepts: Piezoresistive effect, Cantilever, Materials science, Hysteresis, Creep, Calibration, Displacement (psychology), Actuator