Jeyasingh Nithianandam
Abstract
This paper proposes a MEMS capacitance shunt switch based on a microwave transition from a coplanar waveguide on a dielectric membrane to a coplanar waveguide on silicon. Finite element electromagnetic simulations with HFSS show a maximum insertion loss of 1.25 dB and a maximum isolation of 60 dB for the MEMS switch.
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This paper proposes a MEMS capacitance shunt switch based on a microwave transition from a coplanar waveguide on a dielectric membrane to a coplanar waveguide on silicon. Finite element electromagnetic simulations with HFSS show a maximum insertion loss of 1.25 dB and a maximum isolation of 60 dB for the MEMS switch.
Key concepts: HFSS, Coplanar waveguide, Microelectromechanical systems, Shunt (medical), Materials science, Capacitance, Microwave, Insertion loss