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Effect of a Titanium Interlayer on the Performance of the Titanium Nitride Diffusion Barrier

K.-Y Lu, Jen‐Sue Chen

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Key concepts: Tin, Materials science, Diffusion barrier, Titanium nitride, Annealing (glass), Sheet resistance, Titanium, Scanning electron microscope

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Effect of a Titanium Interlayer on the Performance of the Titanium Nitride Diffusion Barrier — Research Paper | ScholarLens