1999•MRS BulletinRequires access

Real-Time X-Ray Scattering Studies of Surface Structure During Metalorganic Chemical Vapor Deposition of GaN

Gregory Brian Stephenson, Jeffrey A. Eastman, Orlando H. Auciello, Anneli Munkholm, Carol Thompson, P. H. Fuoss, P. Fini, Steven P. DenBaars, James S. Speck

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Key concepts: Chemical vapor deposition, Materials science, Microelectronics, Combustion chemical vapor deposition, Synchrotron, Hybrid physical-chemical vapor deposition, Phase (matter), Physical vapor deposition

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Real-Time X-Ray Scattering Studies of Surface Structure During Metalorganic Chemical Vapor Deposition of GaN — Research Paper | ScholarLens