Experimental investigation of the Greek cross-shaped piezoresistive element

Theoretical investigations, which have been carried out before, show that Greek cross shaped piezoresistive elements have sensitivity equal to the Wheatstone piezoresistive bridges. For the first time, experimental investigations of Greek cross shaped piezoresistive element, fabricated on a silicon cantilever, are carried out. Load characteristics and temperature dependencies are obtained. The temperature coefficients of the output voltage, surface resistance and piezoresistivity are calculated. The electrical circuit for thermocompensation is suggested and external resistors are selected.