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2002•Unpublished venueRequires access

MEMS for IT applications

Sukhan Lee, Chungwoo Kim, Sunghwan Jung, In-Sup Song, Yong-Chul Cho

Open publisher page 3 citations

Abstract

The recent progress of MEMS in Samsung Advanced Institute of Technology (SAIT) is presented, focusing on MEMS applications to information technology (IT). The items introduced include: (1) a MEMS gyroscope for consumer electronics; (2) an electrostatic secondary stage MEMS actuator for high density HDD; (3) a micro cooling system for cooling of high performance chips; and (4) a RF MEMS switch for mobile phones. Emphases are given to the factors affecting the commercial success of MEMS as well as the impact of MEMS on future IT.

About this research paper

What this paper is about

The recent progress of MEMS in Samsung Advanced Institute of Technology (SAIT) is presented, focusing on MEMS applications to information technology (IT). The items introduced include: (1) a MEMS gyroscope for consumer electronics; (2) an electrostatic secondary stage MEMS actuator for high density HDD; (3) a micro cooling system for cooling of high performance chips; and (4) a RF MEMS switch for mobile phones. Emphases are given to the factors affecting the commercial success of MEMS as well as the impact of MEMS on future IT.

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OpenAlex reports 3 citations for this work. Citation counts describe recorded attention and do not establish research quality.

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Available abstract

The recent progress of MEMS in Samsung Advanced Institute of Technology (SAIT) is presented, focusing on MEMS applications to information technology (IT). The items introduced include: (1) a MEMS gyroscope for consumer electronics; (2) an electrostatic secondary stage MEMS actuator for high density HDD; (3) a micro cooling system for cooling of high performance chips; and (4) a RF MEMS switch for mobile phones. Emphases are given to the factors affecting the commercial success of MEMS as well as the impact of MEMS on future IT.

Key concepts: Microelectromechanical systems, Actuator, Electronics, Gyroscope, Vibrating structure gyroscope, Electrical engineering, Engineering, Electronic engineering

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