2000•MRS ProceedingsRequires access

Growth of Epitaxial Al2O3 Films on Silicon by Ionized Beam Deposition

Sangwoo Whangbo, Yunki Choi, Kwun‐Bum Chung, Hong-Kyu Jang, C. N. Whang

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Key concepts: Materials science, Epitaxy, Substrate (aquarium), Silicon, X-ray photoelectron spectroscopy, Electron diffraction, Sapphire, Analytical Chemistry (journal)

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