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1996•Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and PhenomenaRequires access

Simultaneous imaging of Si(111) 7×7 with atomic resolution in scanning tunneling microscopy, atomic force microscopy, and atomic force microscopy noncontact mode

Peter Güthner

Open publisher page 75 citations

Abstract

The reconstructed Si (111) 7×7 surface was imaged in several operation modes of the combined ultrahigh vacuum atomic force microscope/scanning tunnel microscope. By imaging single atom defects on the sample surface a clear proof of the atomic resolution in noncontact mode of the force microscope was possible. By simultaneous measurements of several interaction parameters and by the investigation of force-distance curves, it was possible to explain the origin of the interaction.

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What this paper is about

The reconstructed Si (111) 7×7 surface was imaged in several operation modes of the combined ultrahigh vacuum atomic force microscope/scanning tunnel microscope. By imaging single atom defects on the sample surface a clear proof of the atomic resolution in noncontact mode of the force microscope was possible. By simultaneous measurements of several interaction parameters and by the investigation of force-distance curves, it was possible to explain the origin of the interaction.

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OpenAlex reports 75 citations for this work. Citation counts describe recorded attention and do not establish research quality.

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Available abstract

The reconstructed Si (111) 7×7 surface was imaged in several operation modes of the combined ultrahigh vacuum atomic force microscope/scanning tunnel microscope. By imaging single atom defects on the sample surface a clear proof of the atomic resolution in noncontact mode of the force microscope was possible. By simultaneous measurements of several interaction parameters and by the investigation of force-distance curves, it was possible to explain the origin of the interaction.

Key concepts: Non-contact atomic force microscopy, Magnetic force microscope, Conductive atomic force microscopy, Atomic force acoustic microscopy, Atomic force microscopy, Scanning probe microscopy, Resolution (logic), Kelvin probe force microscope

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Simultaneous imaging of Si(111) 7×7 with atomic resolution in scanning tunneling microscopy, atomic force microscopy, and atomic force microscopy noncontact mode — Research Paper | ScholarLens