2009•Unpublished venueRequires access

Modelling of MEMS optical switches

M. Shanmugapriya, M. Meenakshi

Abstract

In this paper, a novel circular structure for MEMS switch is proposed. The MEMS switch is designed to have a movable mirror on a silicon substrate. The tilt of the movable mirror is done by the electrostatic actuator. The electrostatic actuator tilts the mirror to the desired position, so that the optical signals are switched to ON or OFF condition. The performance of the switch is analyzed using INTELLISUITE, MEMS software.

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Available abstract

Key concepts: Microelectromechanical systems, Actuator, Tilt (camera), Optical switch, Position (finance), Comb drive, Silicon, Deformable mirror