Qian Ma, Yinpeng Hu, Ye Lu, Yunzhi Liu, Huan Li, Daoxin Dai
Abstract
We have proposed and implemented a $2 \times 2$ nonvolatile silicon MEMS optical switch based on bistable mechanical beams driven by electrostatic comb actuators, which is fully compatible with standard silicon photonics foundry processes.
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We have proposed and implemented a $2 \times 2$ nonvolatile silicon MEMS optical switch based on bistable mechanical beams driven by electrostatic comb actuators, which is fully compatible with standard silicon photonics foundry processes.
Key concepts: Bistability, Microelectromechanical systems, Silicon, Silicon photonics, Actuator, Materials science, Optical switch, Comb drive