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2012•Nature PhotonicsRequires access

Chemically etched ultrahigh-Q wedge-resonator on a silicon chip

Hansuek Lee, Tong Chen, Jiang Li, Ki Youl Yang, Seokmin Jeon, Oskar J. Painter, Kerry J. Vahala

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Key concepts: Resonator, Optoelectronics, Fabrication, Chip, Materials science, Q factor, Silicon, Optics

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