2009•TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems ConferenceRequires access

Energy loss in MEMS resonators and the impact on inertial and RF devices

Marc S. Weinberg, Rob N. Candler, Saurabh A. Chandorkar, Jonathan S. Varsanik, Thomas Kenny, Amy Duwel

Abstract

In this paper, we review the current understanding of energy loss mechanisms in micromachined (MEMS and NEMS) devices. We describe the importance of high quality factor (Q) to the performance of MEMS gyros and MEMS resonators used in radio-frequency applications.

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Key concepts: Microelectromechanical systems, Nanoelectromechanical systems, Resonator, Materials science, Radio frequency, Q factor, Electronic engineering, Electrical engineering