2015•Elsevier eBooksRequires access
Instruments/Devices. Microelectromechanical Systems
Mircea Dragoman, Daniela Dragoman
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Abstract
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Mircea Dragoman, Daniela Dragoman
Abstract
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Key concepts: Nanoelectromechanical systems, Microelectromechanical systems, Cantilever, Fabrication, Materials science, Nanotechnology, Engineering, Alternative medicine