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Dry etching utilizing showered electron beam assisted etching

S. Matsui, Heiji Watanabe

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Key concepts: Etching (microfabrication), Dry etching, Reactive-ion etching, Engraving, Materials science, Cathode ray, Beam (structure), Isotropic etching

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Dry etching utilizing showered electron beam assisted etching — Research Paper | ScholarLens