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Production of low-electron-temperature electron cyclotron resonance plasma with large area using 915MHz microwave

Naho Itagaki, Satoshi Kawakami, Nobuo Ishii, Yoshinobu Kawai

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Key concepts: Electron cyclotron resonance, Plasma, Microwave, Electron temperature, Atomic physics, Electron, Cyclotron, Cyclotron resonance

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Production of low-electron-temperature electron cyclotron resonance plasma with large area using 915MHz microwave — Research Paper | ScholarLens