Surface Analysis Of Lcd Materials iN Various Stages of Production by Time-of-Flight Secondary Ion Mass Spectroscopy (TOF-SIMS)
J.J. Lee, P. M. Lindley, Robert W. Odom
Abstract
J.J. Lee, P. M. Lindley, Robert W. Odom
Abstract
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Key concepts: Secondary ion mass spectrometry, Materials science, Time of flight, Characterization (materials science), Secondary Ion Mass Spectroscopy, Mass spectrometry, Static secondary-ion mass spectrometry, Monolayer