2013•Frontiers of Mechanical EngineeringRequires access

A multi-probe micro-fabrication apparatus based on the friction-induced fabrication method

Zhijiang Wu, Chenfei Song, Jian Guo, Bingjun Yu, Linmao Qian

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Key concepts: Fabrication, Materials science, Parallelogram, Cantilever, Microelectromechanical systems, Nanotechnology, Etching (microfabrication), Optoelectronics

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