1996•Sensors and Actuators B ChemicalRequires access

Low-power micro gas sensor

Duk-Dong Lee, Wan-Young Chung, Man‐Sik Choi, Jong-Mu Baek

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Key concepts: Microheater, Materials science, Heating element, Thermal, Finite element method, Optoelectronics, Silicon, Microelectromechanical systems