2002•Unpublished venueRequires access
Characterization of an embedded micro-heater for gas sensors applications
M. Baroncini, P. Placidi, A. Scorzoni, G.C. Cardinali, L. Dori, S. Nicoletti
Open publisher page 11 citations
Abstract
The heating characteristic of a microheater element, plated onto a thermally insulated dielectric membrane, define the sensitivity and selectivity of a micromachined gas sensor. Therefore an accurate determination of its temperature is required. In this paper, we describe a new four-point probe heating element configuration together with a simple analytical model of its thermal behavior.