Effect of Structure Parameters on Dynamic Characteristics of Piezoelectric Vibrator in Ultrasonic EDM Processing

A piezoelectric vibrator in ultrasonic EDM processing is designed and fabricated. The structure parameters of the vibrator have a very significant impact on the dynamic characteristics. The effect of different structural parameters on dynamic characteristics of the vibrator is analyzed by using Finite Element Method(FEM), and the modal frequency and vibration amplitude sensitivities of the vibrator to the structural parameters are investigated by modal and harmonic analysis.. According the results of the sensitivities analysis, the structural parameters which have an important impact on the working modal frequency and the vibration amplitude are achieved. The vibrator is designed and made based on the above theoretical analysis. The dynamic characteristics of the piezoelectric vibrator are tested. In the case of exciting voltage of 100V (peak-peak value), the first-order longitudinal vibration frequency (working frequency) of the vibrator is 27.36 kHz, vibration amplitude is about9.8μm, which is in compliance with the theoretically analytical results.