2008•2008 Second International Conference on Integration and Commercialization of Micro and NanosystemsOpen access
Mechanical Properties of PDMS Membrane and Influences of Commonly Used Chemicals in Microfabrication
Miao Liu, Jianren Sun, Ying Sun, Quanfang Chen
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Abstract
Microfluidics is both a science and a technology that offers great and perhaps even revolutionary capabilities to impact the society in the future. Polydimethylsiloxane (PDMS) has been widely used in fabricating microfluidic systems but few attentions were paid in the past to mechanical properties of PDMS. Very importantly there is no report on influences of microfabrication processes which normally involve chemical reaction processes. A comprehensive investigation was made by authors to study fundamental issues regarding chemical emersion and their effects on mechanical properties of PDMS. Results shown in this work can be used to guide future developments of microfluidics in utilizing PDMS especially those devices involve actuation of PDMS membranes.