2002•Integrated ferroelectricsRequires access
Chemical Processing and Properties of (Sr,Ca) 2 (Nb,Ta) 2 O 7 Thin Films
Wataru Sakamoto, Yukinobu Yura, Daisuke Kawasaki, Toshinobu Yogo, Shin‐ichi Hirano
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Abstract
Ca-doped Sr 2 (Nb,Ta) 2 O 7 thin films have been synthesized by the chemical solution deposition. Homogeneous and stable (Sr,Ca) 2 (Nb,Ta) 2 O 7 precursor solutions were prepared by optimizing the reaction of starting metal alkoxides in ethanol with a key additive of 2-ethoxyethanol. The improvement of ferroelectric properties of the Sr 2 (Nb,Ta) 2 O 7 based films were achieved through the Ca substitution into Sr 2 (Nb 0.3 Ta 0.7 ) 2 O 7 as well as the optimization of heating conditions. The crystallization temperature of the layered perovskite (Sr 0.9 Ca 0.1 ) 2 (Nb 0.3 Ta 0.7 ) 2 O 7 thin films on Pt/Ir/Ti/SiO 2 /Si substrates was found to be above 750C. (Sr 0.9 Ca 0.1 ) 2 (Nb 0.3 Ta 0.7 ) 2 O 7 thin films crystallized at 750C exhibited P r of 0.51 w C/cm 2 and E c of 69 kV/cm.