High responsivity, low dark current, large area, heterogenously bonded annular thin-film silicon photodetectors
Sulochana Dhar, N.M. Jokerst
Abstract
Sulochana Dhar, N.M. Jokerst
Abstract
Thin-film crystalline silicon photodiodes with the highest uncooled responsivity to dark current density ratio (0.30-0.54 cm2/nW for λ= 470 nm-600 nm) reported to date are described herein for integrated biomedical imaging and biochemical sensing.
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Thin-film crystalline silicon photodiodes with the highest uncooled responsivity to dark current density ratio (0.30-0.54 cm2/nW for λ= 470 nm-600 nm) reported to date are described herein for integrated biomedical imaging and biochemical sensing.
Key concepts: Responsivity, Dark current, Photodetector, Silicon, Photodiode, Optoelectronics, Materials science, Thin film