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2011•Materials Science and Engineering BRequires access

Structural and electrical properties of Li-doped p-type ZnO thin films fabricated by RF magnetron sputtering

Lidan Tang, Bing Wang, Yue Zhang, Yousong Gu

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Key concepts: Materials science, Sputter deposition, Doping, Thin film, Heterojunction, Cavity magnetron, Semiconductor, Sputtering

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