2003•Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and AtomsRequires access

XAFS characterization of buried Si N O samples

F. Pinakidou, M. Katsikini, E. C. Paloura

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Key concepts: Characterization (materials science), X-ray absorption fine structure, Materials science, Environmental science, Nanotechnology, Physics, Spectroscopy, Quantum mechanics

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XAFS characterization of buried Si N O samples — Research Paper | ScholarLens