A.V. Gridchin
Abstract
The paper presents theory and perspective of four-terminal silicon piezoresistive transducer (FTSP). FEM modeling and applications in pressure, moisture, and acidity sensing is also presented. The paper also discussed silicon nanowires and giant piezoresistive effect.
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The paper presents theory and perspective of four-terminal silicon piezoresistive transducer (FTSP). FEM modeling and applications in pressure, moisture, and acidity sensing is also presented. The paper also discussed silicon nanowires and giant piezoresistive effect.
Key concepts: Piezoresistive effect, Transducer, Terminal (telecommunication), Silicon, Finite element method, Materials science, Nanowire, Perspective (graphical)