Optimization of 4H-SiC separated-absorption-charge-multiplication (SACM) avalanche photodiode with low avalanche breakdown voltage
Rongdun Hong, Xiaping Chen, Mingkun Zhang, Zhengyun Wu, Yi Zhou
Abstract
Rongdun Hong, Xiaping Chen, Mingkun Zhang, Zhengyun Wu, Yi Zhou
Abstract
4H-SiC avalanche photodiode with a separated absorption region, a charge adjustment region and a multiplication region is proposed and its optoelectronic performance is modeled. By properly designing the doping concentration of each layer, the avalanche breakdown voltage and photo-response of the device is found to be dependent of the thickness of the multiplication region. The avalanche breakdown voltage shows a minimum and the photo-response shows a maximum at certain thickness of the multiplication region. The results are explained by the electric field distribution of the device and the impact ionization theory.
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4H-SiC avalanche photodiode with a separated absorption region, a charge adjustment region and a multiplication region is proposed and its optoelectronic performance is modeled. By properly designing the doping concentration of each layer, the avalanche breakdown voltage and photo-response of the device is found to be dependent of the thickness of the multiplication region. The avalanche breakdown voltage shows a minimum and the photo-response shows a maximum at certain thickness of the multiplication region. The results are explained by the electric field distribution of the device and the impact ionization theory.
Key concepts: Avalanche photodiode, Avalanche breakdown, Breakdown voltage, Avalanche diode, Optoelectronics, Materials science, Single-photon avalanche diode, Impact ionization