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1995•Japanese Journal of Applied PhysicsRequires access

New Tilting Mechanism of Electron Gun for Reflection High-Energy Electron Diffraction

Toshihiro Ichikawa, Hisashi Oyama Hisashi Oyama

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Abstract

A new type of mechanism for tilting a reflection high-energy electron diffraction (RHEED) gun has been designed and constructed, which enables us to change the glancing angle of the primary electron beam when the specimen surface is located not only at a fixed position but also is moved to other positions. This is an advantage when other measurements are simultaneously undertaken with RHEED. RHEED measurements of a Si(110) surface were performed by placing the Si(110) surface at different positions, and the ability was verified.

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What this paper is about

A new type of mechanism for tilting a reflection high-energy electron diffraction (RHEED) gun has been designed and constructed, which enables us to change the glancing angle of the primary electron beam when the specimen surface is located not only at a fixed position but also is moved to other positions. This is an advantage when other measurements are simultaneously undertaken with RHEED. RHEED measurements of a Si(110) surface were performed by placing the Si(110) surface at different positions, and the ability was verified.

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Available abstract

A new type of mechanism for tilting a reflection high-energy electron diffraction (RHEED) gun has been designed and constructed, which enables us to change the glancing angle of the primary electron beam when the specimen surface is located not only at a fixed position but also is moved to other positions. This is an advantage when other measurements are simultaneously undertaken with RHEED. RHEED measurements of a Si(110) surface were performed by placing the Si(110) surface at different positions, and the ability was verified.

Key concepts: Reflection high-energy electron diffraction, Electron diffraction, Reflection (computer programming), Electron, Electron gun, Diffraction, Optics, Kikuchi line

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