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1984•Le Journal de Physique ColloquesOpen access

COMPARISON OF SECONDARY ION MASS SPECTROMETRY (SIMS) WITH ELECTRON MICROPROBE ANALYSIS (EPMA) AND OTHER THIN FILM ANALYTICAL METHODS

H. W. Werner, Andreas Rosenstiel

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Abstract

Different modes of SIMS for thin film analysis and the principle of SIMS will be discussed; this will be followed by a discussion of some features related to instrumentation: types of ion sources and their characteristics ; ion microprobe versus ion microscope ; special modes of SIMS : sputter neutral mass spectrometry (SNMS) and fast atom bombardment. (FAB). The discussion of analytical features will include : element range, quantitative analysis, depth profiling, two-dimensional and three-dimensional element mapping. Examples from different fields of application of SIMS will serve to illustrate these different features. In conclusion a comparison of SIMS with other thin film analytical methods will be given with the emphasis on electron microprobe analysis.

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What this paper is about

Different modes of SIMS for thin film analysis and the principle of SIMS will be discussed; this will be followed by a discussion of some features related to instrumentation: types of ion sources and their characteristics ; ion microprobe versus ion microscope ; special modes of SIMS : sputter neutral mass spectrometry (SNMS) and fast atom bombardment. (FAB). The discussion of analytical features will include : element range, quantitative analysis, depth profiling, two-dimensional and three-dimensional element mapping. Examples from different fields of application of SIMS will serve to illustrate these different features. In conclusion a comparison of SIMS with other thin film analytical methods will be given with the emphasis on electron microprobe analysis.

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Available abstract

Different modes of SIMS for thin film analysis and the principle of SIMS will be discussed; this will be followed by a discussion of some features related to instrumentation: types of ion sources and their characteristics ; ion microprobe versus ion microscope ; special modes of SIMS : sputter neutral mass spectrometry (SNMS) and fast atom bombardment. (FAB). The discussion of analytical features will include : element range, quantitative analysis, depth profiling, two-dimensional and three-dimensional element mapping. Examples from different fields of application of SIMS will serve to illustrate these different features. In conclusion a comparison of SIMS with other thin film analytical methods will be given with the emphasis on electron microprobe analysis.

Key concepts: Electron microprobe, Secondary ion mass spectrometry, Microprobe, Analytical Chemistry (journal), Mass spectrometry, Ion, Static secondary-ion mass spectrometry, Materials science

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COMPARISON OF SECONDARY ION MASS SPECTROMETRY (SIMS) WITH ELECTRON MICROPROBE ANALYSIS (EPMA) AND OTHER THIN FILM ANALYTICAL METHODS — Research Paper | ScholarLens