2006•Journal of Physics Conference SeriesOpen access

Numerical and experimental investigations of micro air bearings for micro systems

Qide Zhang, Xuechuan Shan

Abstract

The paper investigated performance of air bearing system in a micro device. A parametric study is carried out. The dynamic performance of a very short journal bearing ( L / D < 0.1) and thrust bearing is studied. The parameters that affect the performance of the air bearing are discussed. The optimum values of the important parameters are explored, and the stability of the thrust bearing is discussed. The prototype and test result are presented.

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Key concepts: Bearing (navigation), Thrust bearing, Air bearing, Parametric statistics, Fluid bearing, Thrust, Structural engineering, Mechanical engineering