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2011•Procedia EngineeringOpen access

Reliability Aspects of Capacitive MEMS Devices

Wilhelmus de Groot, D. Felnhofer, Evgeni Gusev

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Abstract

Capacitive MEMS device forms a key building block for many applications, including sensors, RF applications, user interface technologies, transducers, MEMS displays. In this paper, some important concepts of capacitive MEMS reliability physics will be discussed along with the methodology to evaluate it. Packaging effects will also be covered, as investigated under controlled environment in a dedicated vacuum chamber.

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What this paper is about

Capacitive MEMS device forms a key building block for many applications, including sensors, RF applications, user interface technologies, transducers, MEMS displays. In this paper, some important concepts of capacitive MEMS reliability physics will be discussed along with the methodology to evaluate it. Packaging effects will also be covered, as investigated under controlled environment in a dedicated vacuum chamber.

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Available abstract

Capacitive MEMS device forms a key building block for many applications, including sensors, RF applications, user interface technologies, transducers, MEMS displays. In this paper, some important concepts of capacitive MEMS reliability physics will be discussed along with the methodology to evaluate it. Packaging effects will also be covered, as investigated under controlled environment in a dedicated vacuum chamber.

Key concepts: Microelectromechanical systems, Capacitive sensing, Reliability (semiconductor), Block (permutation group theory), Engineering, Electronic engineering, Mechanical engineering, Computer science

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