1990Applied Physics LettersRequires access

CO2 laser drilling of copper following excimer laser pretreatment

G. Kinsman, W. W. Duley

Open publisher page 8 citations

Abstract

Efficient CO2 laser drilling of copper sheet has been obtained following pretreatment with excimer laser radiation at intensities of (1–2)×106 W cm−2. The present studies show a significant reduction in the laser pulse energy, pulse duration, and gas assist parameters required to drill copper sheets with thicknesses of up to 1 mm. Optimization of laser drilling under these conditions involves a material removal regime that differs from that obtained at high laser intensity when drilling untreated surfaces.

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What this paper is about

Efficient CO2 laser drilling of copper sheet has been obtained following pretreatment with excimer laser radiation at intensities of (1–2)×106 W cm−2. The present studies show a significant reduction in the laser pulse energy, pulse duration, and gas assist parameters required to drill copper sheets with thicknesses of up to 1 mm. Optimization of laser drilling under these conditions involves a material removal regime that differs from that obtained at high laser intensity when drilling untreated surfaces.

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Available abstract

Efficient CO2 laser drilling of copper sheet has been obtained following pretreatment with excimer laser radiation at intensities of (1–2)×106 W cm−2. The present studies show a significant reduction in the laser pulse energy, pulse duration, and gas assist parameters required to drill copper sheets with thicknesses of up to 1 mm. Optimization of laser drilling under these conditions involves a material removal regime that differs from that obtained at high laser intensity when drilling untreated surfaces.

Key concepts: Excimer laser, Laser, Laser drilling, Copper, Excimer, Drilling, Materials science, Pulse duration

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