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Analysis and application of single-element rotating-polarizer (SERP) ellipsometer: Film-thickness determination

A. R. M. Zaghloul, Mohamed M. El‐Bahy, Mohamed Said Abou-Seada

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Key concepts: Polarizer, Ellipsometry, Optics, Materials science, Physics, Thin film, Nanotechnology, Birefringence

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Analysis and application of single-element rotating-polarizer (SERP) ellipsometer: Film-thickness determination — Research Paper | ScholarLens