Ultrasonic linear motors using a multilayered piezoelectric actuator
Kenji Uchino, Koichiro Kato, Masayuki Tohda
Abstract
Kenji Uchino, Koichiro Kato, Masayuki Tohda
Abstract
A new type of linear motor using a multilayered piezoelectric actuator has been developed in which a mechanically resonating part slides on a stationary rail. The slider consists of a multilayered piezoelectric actuator and an elastic vibratory fork bonded together. The key to obtaining a smooth movement is to realize a slight shift in the resonance frequency of each leg of the fork so that the moving direction can be controlled by changing the drive frequency.
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A new type of linear motor using a multilayered piezoelectric actuator has been developed in which a mechanically resonating part slides on a stationary rail. The slider consists of a multilayered piezoelectric actuator and an elastic vibratory fork bonded together. The key to obtaining a smooth movement is to realize a slight shift in the resonance frequency of each leg of the fork so that the moving direction can be controlled by changing the drive frequency.
Key concepts: Slider, Ultrasonic motor, Materials science, Piezoelectricity, Actuator, Piezoelectric motor, Acoustics, Linear motor