2012•Optics & Laser TechnologyRequires access

Fabrication of high aspect ratio subwavelength gratings based on X-ray lithography and electron beam lithography

Chenchen Luo, Yigui Li, Susumu Sugiyama

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Key concepts: X-ray lithography, Electron-beam lithography, Lithography, Materials science, Fabrication, Next-generation lithography, Optics, Stencil lithography

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Fabrication of high aspect ratio subwavelength gratings based on X-ray lithography and electron beam lithography — Research Paper | ScholarLens