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2009•Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIERequires access

A new digital silicon MEMS gyroscope

Lifeng Wu, Zh. Peng, Wei Zhang, F. X. Zhang

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Abstract

This paper presents a new, digital silicon MEMS gyroscope, which consists of micro-sensor, signal processing circuit and micro-processor (MSC1214). The gyroscope structure allows it to achieve rolling rate, yaw angular rate and pitch angular rate of rotating carrier. That is, it can detect the attitude of a rotating carrier. The key techniques of MEMS gyroscope, including sensing construct, sensing principle, signal processing circuit design and test results are presented. The test results show that the non-linearity of the gyroscope is less than 0.5% and sensitivity of the gyroscope is 0.01°/s at atmospheric pressure, measuring range of yaw (or pitch) angular rate and rolling rate of rotating carrier is from -500 ° /s to +500 °/s and 0 Hz to 40 Hz, respectively.

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What this paper is about

This paper presents a new, digital silicon MEMS gyroscope, which consists of micro-sensor, signal processing circuit and micro-processor (MSC1214). The gyroscope structure allows it to achieve rolling rate, yaw angular rate and pitch angular rate of rotating carrier. That is, it can detect the attitude of a rotating carrier. The key techniques of MEMS gyroscope, including sensing construct, sensing principle, signal processing circuit design and test results are presented. The test results show that the non-linearity of the gyroscope is less than 0.5% and sensitivity of the gyroscope is 0.01°/s at atmospheric pressure, measuring range of yaw (or pitch) angular rate and rolling rate of rotating carrier is from -500 ° /s to +500 °/s and 0 Hz to 40 Hz, respectively.

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Available abstract

This paper presents a new, digital silicon MEMS gyroscope, which consists of micro-sensor, signal processing circuit and micro-processor (MSC1214). The gyroscope structure allows it to achieve rolling rate, yaw angular rate and pitch angular rate of rotating carrier. That is, it can detect the attitude of a rotating carrier. The key techniques of MEMS gyroscope, including sensing construct, sensing principle, signal processing circuit design and test results are presented. The test results show that the non-linearity of the gyroscope is less than 0.5% and sensitivity of the gyroscope is 0.01°/s at atmospheric pressure, measuring range of yaw (or pitch) angular rate and rolling rate of rotating carrier is from -500 ° /s to +500 °/s and 0 Hz to 40 Hz, respectively.

Key concepts: Gyroscope, Vibrating structure gyroscope, Rate integrating gyroscope, Microelectromechanical systems, SIGNAL (programming language), Angular velocity, Linearity, Signal processing

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