2012•Applied Mechanics and MaterialsOpen access

The Vibration and Measurement of Drive Mode of MEMS Gyroscope Based on the Image Processing

Jie Zhao, Feng Lin Yao, Shi Gao, Chong Ren Gao

Abstract

This paper introduces the working principle of the micromacined gyroscope, and establishes the drive equation of it. By solving the differential Equation, the analytical solution and the amplitude-frequency characteristics of the driving mode are obtained. By the visual measurement based on high-speed photography and the post image processing, it measures the vibration of the drive mode of the micromachined gyroscope. And it puts forward a novel displacement detect algorithm that based on the image processing, and with Matlab it verifies the analytical solution and the amplitude-frequency characteristics of drive mode of the micromachined gyroscope. This helps the study on the vibration of the micromacined gyroscope, and provides a new way to measure MEMS.

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Available abstract

Key concepts: Gyroscope, Vibrating structure gyroscope, Rate integrating gyroscope, Vibration, Displacement (psychology), Mode (computer interface), MATLAB, Control theory (sociology)